- 高精度測針型CNC表面測量儀可以同時進行表面粗糙度和形狀/輪廓的測量。
- X1軸和Z2軸的最大驅動速度分別為40mm/s和200mm/s，可以高速定位，從而提高了多重輪廓/多工件測量的效率。
- X1軸和Z1軸上裝有三豐激光全息光柵尺，從而可以實現高分辨力的輪廓/ 形狀測量、表面粗糙度的批量測量。
- Z1軸檢出器採用主動控制方式，減少Z1軸動態測力變化的同時擴展了測量範圍。
- Z1軸檢出器集成了防碰撞安全裝置，當儀器主體與工件或夾具發生碰撞時，檢測裝置可以自動停止工作。
- CS-5000CNC帶有α軸，可以通過電動旋轉X1軸連續測量水平面和傾斜面。
- 帶有Y軸工作台的型號，可沿Y軸進行多工件定位，從而增加了多工件測量範圍。
- 可選的外部控制功能(外部I/O)，與PLC實現雙向通信(RS-232C)。
規格:
| Model No. | CS-5000CNC | CS-H5000CNC | ||
| X1 axis | Measuring | 200 mm | ||
| Resolution | 0.005 µm | |||
| Scale type | Transmission-type linear encoder | |||
| Drive speed | CNC mode | Max. 40 mm/s | ||
| Joystick mode | 0 to 40 mm/s | |||
| Measuring speed | 0.02, 0.05, 0.1, 0.2 mm/s (surface roughness), 0.02, 0.05, 0.1, 0.2, 0.5, 1.0, 2.0 mm/s (form/contour) | |||
| Measuring direction | Forward/backward | |||
| Straightness | (with standard stylus) | (0.1+0.0015L) µm L: traverse length (mm) | (0.05+0.0003L) µm L: traverse length (mm) | |
| (with 2X-long stylus) | (0.2+0.0015L) µm L: traverse length (mm) | (0.1+0.0015L) µm L: traverse length (mm) | ||
| Accuracy (20 oC) | ±(0.3+0.002L) µm L: traverse length (mm) | ±(0.16+0.001L) µm L: traverse length (mm) | ||
| α axis | Inclination range | -45o (CCW), +10o (CW) | — | |
| Z1 axis (Detector) | Measuring range | (with standard stylus) | 12 mm | |
| (with 2X-long stylus) | 24 mm | |||
| Resolution | (with standard stylus) | 0.0008 µm | ||
| (with 2X-long stylus) | 0.0016 µm | |||
| Vertical movement of the stylus | Arc motion | |||
| Scale type | Transmission-type linear encoder | |||
| Accuracy (20 oC) | ±(0.3+|0.02H|) µm H: probing height (mm) | ±(0.07+|0.02H|) µm H: probing height (mm) | ||
| Measuring force | (with standard stylus) | 4 mN (Fixed) | ||
| (with 2X-long stylus) | 0.75 mN (Fixed) | |||
| Traceable angle | Ascent: 60o, Descent: 60o, (Depends on the surface texture) | |||
| Stylus tip shape | Standard stylus | Tip angle: 40o, Tip radius: 5 µm, Diamond tip | ||
| Standard ball stylus | Tip ball radius: 0.25 mm, Sapphire | |||
| 2X-long stylus | Tip angle: 40o, Tip radius: 5 µm, Diamond tip | |||
| 2X-long stylus | — | Tip angle: 60o, Tip radius: 2 µm, Diamond tip | ||
| 2X-long ball stylus | Tip ball radius: 0.25 mm, Sapphire | |||
| Face of stylus | Download | |||
| Z2 axis (Column) | Travel range | Z2 axis (column, type S) | 300 mm | |
| Z2 axis (column, type H) | 500 mm | — | ||
| Resolution | 0.05 µm | |||
| Scale type | Reflective-type linear encoder | |||
| Drive speed | CNC mode | Max. 200 mm/s | ||
| Joystick mode | 0 to 50 mm/s | |||
| Base size (widthxdepth) | 750×600 mm | |||
| Base material | Gabbro | |||
